sentronics metrology offers a sophisticated portfolio of SemDex Metrology Systems for all semiconductor FAB’s to control the quality of the entire manufacturing process and to communicate quality results via SECS/GEM to the host of the FAB.

The range includes semi-automated SemDex Metrology Systems such as SemDex 301 and SemDex M1 up to fully-automated Systems like SemDex M2 and SemDex A.

Each Systems contains multiple optical measuring instruments to measure geometric dimensions of wafers, microchips, as long as they are part of a wafer, or sub-structures of a microchip either they are manufactured in front-end-of-line (FEOL), back-end-of-line (BEOL) or Advanced Packaging processes.

The technologies behind the measuring instruments are based on optical interferometry and reflectometry as well as on microscopic techniques which count to the most precise measurement methods for geometric dimensions.